Diffraction limited, EUV interference microscope with long workingdistance, using one spherical off-axis mirror and a Fresnelbimirror interferometer

Publisher： Edp Sciences

E-ISSN： 1764-7177|104|issue|263-266

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.104, Iss.issue, 2003-03, pp. : 263-266

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