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Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry

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Epitaxy surface effect on the critical properties of a ferroelectric thin film

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Polarimetry of light scattered by surface roughness and textured films and periodic structures in nanotechnologies: a new challenge in instrumentation and modeling

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Metrological applications of Mueller polarimetry in conical diffraction for overlay characterization in microelectronics

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