High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials

Author： Spannhake Jan   Schulz Olaf   Helwig Andreas   Krenkow Angelika   Müller Gerhard   Doll Theodor  

Publisher： MDPI

E-ISSN： 1424-8220|6|4|405-419

ISSN： 1424-8220

Source： Sensors, Vol.6, Iss.4, 2006-04, pp. : 405-419

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