Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

Author: Ballestra Alberto   Somà Aurelio   Pavanello Renato  

Publisher: MDPI

E-ISSN: 1424-8220|8|2|767-783

ISSN: 1424-8220

Source: Sensors, Vol.8, Iss.2, 2008-02, pp. : 767-783

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Abstract