Modeling of Photoinduced Deformation in Silicon Microcantilevers

Author： Guo Yu-Lin   Zhou Jia   Huang Yiping   Bao Min Hang  

Publisher： MDPI

E-ISSN： 1424-8220|7|9|1713-1719

ISSN： 1424-8220

Source： Sensors, Vol.7, Iss.9, 2007-09, pp. : 1713-1719

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