Reliability of a MEMS Actuator Improved by Spring Corner Designs and Reshaped Driving Waveforms

Author: Hsieh Hsin-Ta   Su Guo-Dung John  

Publisher: MDPI

E-ISSN: 1424-8220|7|9|1720-1730

ISSN: 1424-8220

Source: Sensors, Vol.7, Iss.9, 2007-09, pp. : 1720-1730

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Abstract