Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH

Author： Lu Rong   Wu Yanhong   Cheng Haitao   Yang Heng   Li Xinxin   Wang Yuelin  

Publisher： MDPI

E-ISSN： 1424-8220|9|4|2470-2477

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.4, 2009-04, pp. : 2470-2477

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