Fabrication and Characteristics of an nc-Si/c-Si Heterojunction MOSFETs Pressure Sensor

Author: Zhao Xiaofeng   Wen Dianzhong   Li Gang  

Publisher: MDPI

E-ISSN: 1424-8220|12|5|6369-6379

ISSN: 1424-8220

Source: Sensors, Vol.12, Iss.5, 2012-05, pp. : 6369-6379

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Abstract