Fabrication and Characterization of a Tunable In-plane Resonator with Low Driving Voltage

Author： Kao Pin-Hsu Dai Ching-Liang Hsu Cheng-Chih Lee Chi-Yuan

Publisher： MDPI

E-ISSN： 1424-8220|9|3|2062-2075

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.3, 2009-03, pp. : 2062-2075

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