Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine

Author： Tibrewala Arti   Hofmann Norbert   Phataralaoha Anurak   Jäger Gerd   Büttgenbach Stephanus  

Publisher： MDPI

E-ISSN： 1424-8220|9|05|3228-3239

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.05, 2009-04, pp. : 3228-3239

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