High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

Author: Sarajlic Edin   Yamahata Christophe   Berenschot Erwin   Tas Niels   Fujita Hiroyuki   Krijnen Gijs  

Publisher: MDPI

E-ISSN: 2072-666x|1|2|48-67

ISSN: 2072-666x

Source: Micromachines, Vol.1, Iss.2, 2010-07, pp. : 48-67

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