Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

Author: Chang Honglong   Shen Qiang   Zhou Zhiguang   Xie Jianbing   Jiang Qinghua   Yuan Weizheng  

Publisher: MDPI

E-ISSN: 1424-8220|10|4|3835-3856

ISSN: 1424-8220

Source: Sensors, Vol.10, Iss.4, 2010-04, pp. : 3835-3856

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Abstract