Thin Film Deposition Using Energetic Ions

Author: Manova Darina   Gerlach Jürgen W.   Mändl Stephan  

Publisher: MDPI

E-ISSN: 1996-1944|3|8|4109-4141

ISSN: 1996-1944

Source: Materials, Vol.3, Iss.8, 2010-07, pp. : 4109-4141

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