Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers

Author: Lee Sangmin   Ko Hyoungho   Choi Byoungdoo   Cho Dong-il Dan  

Publisher: MDPI

E-ISSN: 1424-8220|10|12|10524-10544

ISSN: 1424-8220

Source: Sensors, Vol.10, Iss.12, 2010-11, pp. : 10524-10544

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Abstract