Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy

Author： Chiang Mao-Hsiung

Publisher： MDPI

E-ISSN： 1424-8220|10|4|2675-2693

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.4, 2010-03, pp. : 2675-2693

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