Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors

Author： Mariani Stefano   Ghisi Aldo   Corigliano Alberto   Martini Roberto   Simoni Barbara  

Publisher： MDPI

E-ISSN： 1424-8220|11|issue|4972-4989

ISSN： 1424-8220

Source： Sensors, Vol.11, Iss.issue, 2011-05, pp. : 4972-4989

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