Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor(MSS) with Improved Sensitivity

Author: Yoshikawa Genki   Akiyama Terunobu   Loizeau Frederic   Shiba Kota   Gautsch Sebastian   Nakayama Tomonobu   Vettiger Peter   de Rooij Nico F.   Aono Masakazu  

Publisher: MDPI

E-ISSN: 1424-8220|12|11|15873-15887

ISSN: 1424-8220

Source: Sensors, Vol.12, Iss.11, 2012-11, pp. : 15873-15887

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Abstract