Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application

Author： Shi Yunbo   Guo Hao   Ni Haiqiao   Xue Chenyang   Niu Zhichuan   Tang Jun   Liu Jun   Zhang Wendong   He Jifang   Li Mifeng   Yu Ying  

Publisher： MDPI

E-ISSN： 1996-1944|5|12|2917-2926

ISSN： 1996-1944

Source： Materials, Vol.5, Iss.12, 2012-12, pp. : 2917-2926

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