Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing

Author: Liu Yaxin   Chen Liguo   Sun Lining  

Publisher: MDPI

E-ISSN: 1424-8220|9|6|4138-4150

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.6, 2009-06, pp. : 4138-4150

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Abstract