A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

Author： Tan Qiulin   Kang Hao   Xiong Jijun   Qin Li   Zhang Wendong   Li Chen   Ding Liqiong   Zhang Xiansheng   Yang Mingliang  

Publisher： MDPI

E-ISSN： 1424-8220|13|8|9896-9908

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.8, 2013-08, pp. : 9896-9908

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