A Self-Aligned a-IGZO Thin-Film Transistor Using a New Two-Photo-Mask Process with a Continuous Etching Scheme

Author: Fan Ching-Lin   Shang Ming-Chi   Li Bo-Jyun   Lin Yu-Zuo   Wang Shea-Jue   Lee Win-Der  

Publisher: MDPI

E-ISSN: 1996-1944|7|8|5761-5768

ISSN: 1996-1944

Source: Materials, Vol.7, Iss.8, 2014-08, pp. : 5761-5768

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