Micromachining of AlN and Al2O3 Using Fiber Laser

Author: Preusch Florian   Adelmann Benedikt   Hellmann Ralf  

Publisher: MDPI

E-ISSN: 2072-666x|5|4|1051-1060

ISSN: 2072-666x

Source: Micromachines, Vol.5, Iss.4, 2014-11, pp. : 1051-1060

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract