Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

Author： Lazar Josef   Klapetek Petr   Valtr Miroslav   Hrabina Jan   Buchta Zdenek   Cip Onrej   Cizek Martin   Oulehla Jindrich   Sery Mojmir  

Publisher： MDPI

E-ISSN： 1424-8220|14|1|877-886

ISSN： 1424-8220

Source： Sensors, Vol.14, Iss.1, 2014-01, pp. : 877-886

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