Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

Author： EL Fissi Lamia Xhurdebise Victor Francis Laurent A.

Publisher： MDPI

E-ISSN： 2072-666x|6|1|19-31

ISSN： 2072-666x

Source： Micromachines, Vol.6, Iss.1, 2014-12, pp. : 19-31

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