Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution †

Author： Lu Han   Zhang Hua   Jin Mingliang   He Tao   Zhou Guofu   Shui Lingling  

Publisher： MDPI

E-ISSN： 2072-666x|7|2|19-19

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.2, 2016-01, pp. : 19-19

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