Micromechanical Characterization of Polysilicon Films through On-Chip Tests

Author: Mirzazadeh Ramin   Eftekhar Azam Saeed   Mariani Stefano  

Publisher: MDPI

E-ISSN: 1424-8220|16|8|1191-1191

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.8, 2016-07, pp. : 1191-1191

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Abstract