Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

Author: Yang Zhan   Wang Yaqiong   Yang Bin   Li Guanghui   Chen Tao   Nakajima Masahiro   Sun Lining   Fukuda Toshio  

Publisher: MDPI

E-ISSN: 1424-8220|16|9|1479-1479

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.9, 2016-09, pp. : 1479-1479

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Abstract