Susceptor Coating Materials Applicable for SiC Reactor Cleaning

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2017|897|99-102

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2017, Iss.897, 2017-06, pp. : 99-102

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract