Publisher: Trans Tech Publications
E-ISSN: 1662-9752|2017|897|711-714
ISSN: 0255-5476
Source: Materials Science Forum, Vol.2017, Iss.897, 2017-06, pp. : 711-714
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Preparation of AlN thin films by nitridation of Al-coated Si substrate
By Huang J. Wang L. Shen Q. Lin C. Ostling M.
Thin Solid Films, Vol. 340, Iss. 1, 1999-02 ,pp. :