Deposition and Characterization of C-NbN/NbCN Multilayers on Si(100) Substrates

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2017|898|1447-1452

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2017, Iss.898, 2017-07, pp. : 1447-1452

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Abstract