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Author: Carter G. He Z. Colligon J.S.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.283, Iss.1, 1996-09, pp. : 90-96
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Abstract
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Room-temperature deposition of a-SiC:H thin films by ion-assisted plasma-enhanced CVD
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By Ljungcrantz H. Benhenda S. Hakansson G. Ivanov I. Hultman L. Greene J.E. Sundgren J.-E.
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