Formation of Nanosized Coatings in Hybrid Plasma Reactor Combining Magnetron or Arc Deposition with RF Plasma Assistance

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2017|900|137-140

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2017, Iss.900, 2017-08, pp. : 137-140

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Abstract