Plasma diagnostic of an RF magnetron Ar/N 2 discharge

Author: Fritsche B.   Chevolleau T.   Kourtev J.   Kolitsch A.   Moller W.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.69, Iss.1, 2002-12, pp. : 139-145

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Abstract