Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition

Publisher: Edp Sciences

E-ISSN: 1286-0050|81|1|10804-10804

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.81, Iss.1, 2018-02, pp. : 10804-10804

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Abstract