Humidity influence on the adhesion of SU-8 polymer from MEMS applications

Author： Birleanu Corina  

Publisher： Edp Sciences

E-ISSN： 2261-236x|137|issue|08002-08002

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.137, Iss.issue, 2017-11, pp. : 08002-08002

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