Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

Author： Al-Ghamdi Majed S. Alneamy Ayman M. Park Sangtak Li Beichen Khater Mahmoud E. Abdel-Rahman Eihab M. Heppler Glenn R. Yavuz Mustafa

Publisher： MDPI

E-ISSN： 1424-8220|17|5|1121-1121

ISSN： 1424-8220

Source： Sensors, Vol.17, Iss.5, 2017-05, pp. : 1121-1121

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