Effects of Bias Voltage on Microstructure, Hardness and Bonding Strength of TiN Coating Deposited by High Power Pulsed Magnetron Sputtering

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2018|281|534-539

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2018, Iss.281, 2018-10, pp. : 534-539

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