Self-Aligned Contacting Processes for the 80 nm p-MTJ Device Fabrication by Wet Approach

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2018|282|152-157

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2018, Iss.282, 2018-10, pp. : 152-157

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