Magnetic Field MEMS-Sensor: Functional Characteristics Control during the Formation of Magnetosensitive Structures

Publisher: Trans Tech Publications

E-ISSN: 1662-9507|2018|386|161-166

ISSN: 1012-0386

Source: Defect and Diffusion Forum, Vol.2018, Iss.386, 2018-11, pp. : 161-166

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Abstract