Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

By Delattre Pierre-Alexandre   Lafleur Trevor   Johnson Erik   Booth Jean-Paul  

Journal of Physics D: Applied Physics, Vol. 46, Iss. 23, 2013-06 ,pp. : 235201-235213

IOP Publishing

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Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

By Bruneau B   Novikova T   Lafleur T   Booth J P   Johnson E V  

Plasma Sources Science and Technology, Vol. 24, Iss. 1, 2015-02 ,pp. : 15021-15030

IOP Publishing

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Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

By Bruneau B   Novikova T   Lafleur T   Booth J P   Johnson E V  

Plasma Sources Science and Technology, Vol. 23, Iss. 6, 2014-12 ,pp. : 65010-65018

IOP Publishing

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Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms

By Lafleur T   Chabert P   Turner M M   Booth J P  

Plasma Sources Science and Technology, Vol. 22, Iss. 6, 2013-12 ,pp. : 65013-65023

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Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms

By Derzsi Aranka   Lafleur Trevor   Booth Jean-Paul   Korolov Ihor   Donkó Zoltán  

Plasma Sources Science and Technology, Vol. 25, Iss. 1, 2016-02 ,pp. : 15004-15017

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