The Impact of Shallow-Trench-Isolation Mechanical Stress on the Hysteresis Effect of Partially Depleted Silicon-on-Insulator n-Type Metal-Oxide-Semiconductor Field Effects

Publisher: IOP Publishing

E-ISSN: 1741-3540|31|12|126601-126603

ISSN: 0256-307X

Source: Chinese Physics Letters, Vol.31, Iss.12, 2014-12, pp. : 126601-126603

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