Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas

Author： Lee Huijea Yi Changho Park Seungil Cho Moohyun Namkung Won Lee Huijea Lee Huijea

E-ISSN： 1361-6595|24|1|15031-15036

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.1, 2015-02, pp. : 15031-15036

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