Effect of pressure on the gas-phase chemistry when using monomethylsilane and dimethylsilane in hot-wire chemical vapor deposition

Publisher： NRC Research Press

E-ISSN： 1480-3291|93|1|82-90

ISSN： 1480-3291

Source： Canadian Journal of Chemistry, Vol.93, Iss.1, 2015-01, pp. : 82-90

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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