Effect of Improved Tracking for Atomic Force Microscope on Piezo Nonlinear Behavior

Publisher： John Wiley & Sons Inc

E-ISSN： 1934-6093|17|3|747-761

ISSN： 1561-8625

Source： ASIAN JOURNAL OF CONTROL, Vol.17, Iss.3, 2015-05, pp. : 747-761

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