Influence of substrate temperature and N2/Ar flow ratio on the stoichiometry, structure and hardness of TaNx coatings deposited by DC reactive sputtering

Publisher： John Wiley & Sons Inc

E-ISSN： 1096-9918|47|11|1015-1019

ISSN： 0142-2421

Source： SURFACE AND INTERFACE ANALYSIS, Vol.47, Iss.11, 2015-11, pp. : 1015-1019

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