Influence of He, Ne and Kr addition in reactive Ar/N 2 dc magnetron plasma on TiN deposition

Author: Braic M.   Zoita C.N.   Braic V.   Kiss A.   Popescu M.   Musa G.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.53, Iss.1, 1999-05, pp. : 41-45

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Abstract