PDMS-based flexible energy harvester with Parylene electret and copper mesh electrodes

Author: Chiu Y   Lee M H   Wu S-H  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|10|104007-104014

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 104007-104014

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Abstract