Author： Brandhoff Lukas Zirath Helene Salas Mariugenia Haller Anna Peham Johannes Wiesinger-Mayr Herbert Spittler Andreas Schnetz Guntram Lang Walter Vellekoop Michael J
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|10|104001-104009
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 104001-104009
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