A volume averaged global model study of the influence of the electron energy distribution and the wall material on an oxygen discharge

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|49|495203-495213

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.49, 2015-12, pp. : 495203-495213

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Abstract