A white-light interferometer as a gauge to measure the thickness of thin film: a practical extension of the phase method and correlogram summation

Publisher： IOP Publishing

E-ISSN： 2040-8986|17|12|125616-125625

ISSN： 2040-8986

Source： Journal of Optics, Vol.17, Iss.12, 2015-12, pp. : 125616-125625

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